Ultra-High Purity Vacuum Generators (VG1)

Technical Data

Orifice Size	1.35mm
Ultimate Pressure	50torr (66.7mbar)
Gas Flow at Ultimate	60ℓ / min
Gas Pressure at Ultimate	80psig
Optimize working Pressure	80~100psig
Orifice Size	1.35mm
Max. Working Pressure	150psig (10kgf/cm2)
Operating Temperature	0~150℃

* measured when operating gas flow is over 60LPM and extension vent tube length is over 20mm. Note1. The dimension of drawing is for reference only. Please contact us for customer drawing and special product. Product Features ■ 50torr(66.7mbar) vacuum generated with a minimum source Nitrogen pressure of 80psig. ■ Ultrasonic and D.I. water cleaned for semiconductor Ultra-high purity. ■ Cleaned, welded, assembled, tested and packaged in a Class 100 or 10 clean room. ■ 100% tested for vacuum performance and Helium leakage. Ordering Number Ordering Information

MATERIAL		SIZE		CONNECTION		GRADE
S	316L Stainless Steel	4	1/4″	VM	MFS Male	A	AP Grade
D	316L Stainless Steel Remelted	6	3/8″	VF	MFS Female	BLANK	BA Grade
-	-	8	1/2″	TW	Tube Butt Weld	P	EP Grade

Vacuum and Flow Specification