|TRANSFER TYPE||VFC,Bubbler, DLI Type|
|Valve type||Diaphragm Valve , Bellows Valve Etc|
|Inlet / Out let Port||1/4", 3/8", 1/2" Metal Face Seal|
|Refill Port||1/2" Male VCR|
■ Features ■ Design & Manufacturing according to UHP Semi Standards. ■ Vertical (Horizontal) Electropolished Stainless Steel Bubbler with Fill Port is available. ■ Customized valve can be available by replacing Seat (HPR Series). ■ Connection Size : 1/4", 3/8", 1/2" ■ Connection Type : MFS (Metal Face Seal) Type. ■ Volume ( Liter ) : 0.1, 0.2, 0.4, 0.5, 1.0, 2.5, 4.5, 6.0, 10, 20, 100, 200. ■ Canister can be provided upon customer's request. ■ Flow Control : Valve + MFC (Mass Flow Control).
|Bubbler Type||VFC Type||DLI Type|
|It is applicable when normal vapor pressure and small volume of delivered precursor is forcibly vaporized to the equipment||IIt is applicable when high vapor pressure and small volume of delievered precusor is forcibly vaporized to the equipment||It is applicable when low vapor pressure and large volume of delivered precusor is forcibly vaporized to the equipment|